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发明名称
POLISHING COMPOSITION AND POLISHING METHOD
摘要
申请公布号
SG131098(A1)
申请公布日期
2007.04.26
申请号
SG20060067730
申请日期
2006.09.28
申请人
FUJIMI INCORPORATED
发明人
ITO TAKASHI;KIMURA YOSHIO
分类号
B24B37/00;B82Y10/00;H01L21/304
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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