发明名称 Dark-field objective for alternating glazing incidence microscopy, has pair of light decoupling elements positioned around front lens
摘要 <p>A dark field objective for a microscope, has a front lens for receiving light from a test specimen, and a dark-field illumination device for guiding the illumination light to the test specimen. The dark field illumination device comprises at least one pair of light decoupling elements, arranged relative to the optical axis around the front lens for alternating, anti-parallel illumination of the test specimen.</p>
申请公布号 DE102005047847(A1) 申请公布日期 2007.04.26
申请号 DE20051047847 申请日期 2005.10.05
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 HEIDEN, MICHAEL;VOLLRATH, WOLFGANG
分类号 G02B21/10;G02B21/06 主分类号 G02B21/10
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