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发明名称
WET STATION FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
KR100714276(B1)
申请公布日期
2007.04.26
申请号
KR20050112826
申请日期
2005.11.24
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, CHUL
分类号
H01L21/3063;H01L21/304
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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