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发明名称
摘要
申请公布号	JP3905014(B2)	申请公布日期	2007.04.18
申请号	JP20020297902	申请日期	2002.10.10
申请人		发明人
分类号	C23C18/18;C23C18/30;C23C18/34;C23C18/52	主分类号	C23C18/18
代理机构		代理人
主权项
地址

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