APPARATUS FOR SENSING GLASS SUBSTRATES IN A CASSETTE

摘要

Provided is an apparatus for detecting substrates in a cassette. The apparatus for detecting substrates in a cassette includes: a first body fixedly placed in manufacturing equipment; and a second body fixedly placed at a position facing the first body to receive a signal sent from the first body. The first body includes: a light transmitting element composed of one or more light emitting elements, and a light transmission controller that controls operations of the light emitting elements of the light transmitting element. The second body includes: a light receiving element composed of one or more sensors that detect a signal sent from the light transmitting element, and a light receiving controller that uses signals detected by the sensors of the light receiving element to determine whether substrates are present in respective channels of the cassette and that sends resultant data of determination to an external device. Accordingly, the substrate detecting apparatus is fixedly placed in manufacturing equipment, thereby not requiring an additional driver. Further, its overall structure is simple, and an extra driving time is not consumed to move a detector into a cassette. Furthermore, since a light transmitting/receiving sensor is used, stable detection can be achieved with a transparent glass material having a high transmittance and specular reflectance.