| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner capable of improving the detection accuracy of the focus position at exposure. <P>SOLUTION: The aligner 20 is equipped with a illumination optical system 22, including a light source 23 for exposure which emits an exposure light, a projection optical system 24 which guides the exposure light to a substrate 1, a detection light source 29 which emits detection light for focus position detection during the exposure, a polarizer 30 capable of polarizing the detection light emitted by the detection light source 29 into specified polarized light, and an optical detector 32 which detects the reflected light, when the substrate 1 is irradiated with the detection light polarized into the specified polarized light by the polarizer 30. <P>COPYRIGHT: (C)2007,JPO&INPIT |
