发明名称 FIELD-EFFECT TRANSISTOR HAVING 2-DIMENSIONAL CARRIER GAS LAYER
摘要 PROBLEM TO BE SOLVED: To cope with the problem that a normally-off characteristic is required in a field-effect transistor (HEMT) that uses a 2-dimensional electronic gas layer. SOLUTION: On a first principal plane 11 of a main semiconductor region 1 including an electron running layer 8 and n-type electron supply layer 9, a source electrode 3, a drain electrode 4, and a gate electrode 5 are prepared, and an n-type organic semiconductor film 6 is prepared as well. The n-type electron supply layer 9 is made to be thin so that a normally-off characteristic can be obtained. The n-type organic semiconductor film 6 compensates the lowering of an electron concentration at a 2DEG layer 14 based on the thin n-type electron supply layer 9, serving to prevent a decrease of ON-resistance. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007096203(A) 申请公布日期 2007.04.12
申请号 JP20050286550 申请日期 2005.09.30
申请人 SANKEN ELECTRIC CO LTD 发明人 OTSUKA KOJI;MACHIDA OSAMU;MUROFUSHI HITOSHI;BABA RYOHEI
分类号 H01L21/338;H01L29/06;H01L29/778;H01L29/812;H01L51/05 主分类号 H01L21/338
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