发明名称 SHORT-ARC TYPE HIGH-PRESSURE DISCHARGE ELECTRODE, SHORT-ARC TYPE HIGH-PRESSURE DISCHARGE TUBE, SHORT-ARC TYPE HIGH-PRESSURE DISCHARGE LIGHT SOURCE DEVICE AND THEIR MANUFACTURING METHODS
摘要 PROBLEM TO BE SOLVED: To improve stability, durability and reliability of discharging characteristics. SOLUTION: In the manufacturing method of a short-arc type high-pressure electrode in which an electrode main body 1 is provided at a tip end part of a respective electrode core shaft 3 made of refractory metal, temporary sintering of a molding body of the electrode main body having a center hole to produce a temporary sintering molding body 12 having an empty hole ratio higher than that of the electrode core shaft 3 is conducted by using refractory metal powder and a discharge electrode structuring body 21 is structured by inserting the tip end part of the electrode core shaft 3 into the center hole of the temporary sintering molding body of the electrode main body 2. A sintering thermal treatment is conducted for the discharge electrode structuring body 21. The electrode main body 2 and the electrode core shaft 3 are combined by regular sintering of the electrode main body 2, using difference of contraction coefficient between the electrode main body 2 and the electrode core shaft 3. Thus, occurrence of crack and the like is avoided as remained inner strain is avoided and it is possible to improve stability, durability and reliability of discharging characteristics. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007095665(A) 申请公布日期 2007.04.12
申请号 JP20060198639 申请日期 2006.07.20
申请人 SONY CORP 发明人 HASEGAWA YOJI;KODAMA TAKESHI;MATSUURA KENICHI;FURUKAWA MAKOTO
分类号 H01J61/073;H01J9/02;H01J9/04;H01J61/86 主分类号 H01J61/073
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