Method for coating electrically insulating surfaces by CVD or PVD e.g. for materials research, involves forming micro-heating elements on ceramic substrate

摘要

A method for coating electrically insulating substrates by CVD or PVD, in which before the CVD- or PVD-coating process, micro-heating elements (2) are formed on a ceramic substrate (1) via/over which during the CVD- or PVD-coating process energy is released on the surface of the substrate to be coated. Independent claims are included for the following. (1) (A) A substrate coated by CVD or PVD and (2) (B) Application of substrates coated by CVD or PVD as micro-sensors or micro-actuators.