发明名称 Method for manufacturing ultrafine carbon fiber and field emission element
摘要 A method for manufacturing an ultrafine carbon fiber of the present invention has several steps as follows. In the first step, a semiconductor film is formed over a surface having insulative. In the second step, a first treatment is performed so that a metal element or a silicide of the metal element is segregated on a crystal grain boundary of the semiconductor film after adding the metal element in the semiconductor film. In the third step, a second treatment is performed so that an ultrafine carbon fiber on the surface of the metal element or the silicide of the metal element is formed.
申请公布号 US7201627(B2) 申请公布日期 2007.04.10
申请号 US20040900431 申请日期 2004.07.28
申请人 SEMICONDUCTOR ENERGY LABORATORY, CO., LTD. 发明人 OHNUMA HIDETO
分类号 H01J9/04;C01B31/02;C01B31/04;D01F9/127;H01J9/02;H01J9/12;H01J9/14 主分类号 H01J9/04
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