发明名称 |
Method for manufacturing ultrafine carbon fiber and field emission element |
摘要 |
A method for manufacturing an ultrafine carbon fiber of the present invention has several steps as follows. In the first step, a semiconductor film is formed over a surface having insulative. In the second step, a first treatment is performed so that a metal element or a silicide of the metal element is segregated on a crystal grain boundary of the semiconductor film after adding the metal element in the semiconductor film. In the third step, a second treatment is performed so that an ultrafine carbon fiber on the surface of the metal element or the silicide of the metal element is formed.
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申请公布号 |
US7201627(B2) |
申请公布日期 |
2007.04.10 |
申请号 |
US20040900431 |
申请日期 |
2004.07.28 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY, CO., LTD. |
发明人 |
OHNUMA HIDETO |
分类号 |
H01J9/04;C01B31/02;C01B31/04;D01F9/127;H01J9/02;H01J9/12;H01J9/14 |
主分类号 |
H01J9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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