METHOD OF CLEANING DIELECTRIC ARTICLES (VARIANTS)

摘要

It is disclosed a method of cleaning dielectric articles. In the first embodiment of method for cleaning of external and internal surfaces the dielectric articles are placed in the cassettes from radio-transparent material into degasified working volume of multimode cylindrical resonator, after degassing of which the supply of working gas is adjusted until appearance of a stationary high-frequency discharge in the vacuum volume of resonator, then the supply of gas supply is decreased with constant exhaust until appearance high-frequency discharge inside the articles, after which the supply of gas is stopped and the exhaust is continued up to discharge suppression inside the articles. In another embodiment for cleaning of external and internal surfaces the article in the cassettes made of radio-transparent material are placed into degasified working volume of multimode cylindrical cavity, after degassing of which the supply of working gas is adjusted until appearance of a stationary high-frequency discharge in the said volume of resonator, then the supply of gas is stopped and the exhaust is continued up to discharge suppression inside the vacuum volume.