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经营范围
发明名称
VACUUM EXHAUSTING APPARATUS
摘要
申请公布号
KR20070037880(A)
申请公布日期
2007.04.09
申请号
KR20050093030
申请日期
2005.10.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
NO, JIN WOOK
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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