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发明名称
PATTERN FOR MONITORING PROCESS DEFECTS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100707577(B1)
申请公布日期
2007.04.06
申请号
KR20050134877
申请日期
2005.12.30
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
KIM, JOUNG TAE
分类号
H01L21/66;H01L21/027
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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