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发明名称
VERFAHREN ZUR HERSTELLUNG EINER FERROELEKTRISCHEN SPEICHERZELLE IN EINEM FERROELEKTRISCHEN SPEICHERBAUSTEIN UND FERROELEKTRISCHER SPEICHERBAUSTEIN
摘要
申请公布号
DE60312014(D1)
申请公布日期
2007.04.05
申请号
DE20036012014
申请日期
2003.06.16
申请人
THIN FILM ELECTRONICS ASA
发明人
LJUNGCRANTZ, HENRIK;EDVARDSSON, NICLAS;CARLSSON, JOHAN;GUSTAFSSON, GOERAN
分类号
G11C5/00;G11C11/22;C23C14/24;H01L21/285;H01L21/3205;H01L27/115
主分类号
G11C5/00
代理机构
代理人
主权项
地址
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