发明名称 DETECTOR AND METHOD FOR DETECTING PRESENCE OF TEST GAS
摘要 PROBLEM TO BE SOLVED: To provide a detector and a method for detecting the presence of test gas with high sensitivity, as to a conventional technique. SOLUTION: The present invention discloses the detector and the method for detecting the presence of the test gas. The detector includes a vacuum chamber connected to a vacuum pump provided with an electronic power source unit. At least one portion of the vacuum chamber is separated from a peripheral external environment by a film selectively permeable as to the test gas. A gas flow from the external environment is guided forcibly over the whole film surface via a flow conveying member, including an intake duct, a diffusion member and an exhaust duct. The presence of the test gas is detected by the change in the current to the vacuum pump supplied from an electric power source. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007086069(A) 申请公布日期 2007.04.05
申请号 JP20060252826 申请日期 2006.09.19
申请人 VARIAN SPA 发明人 CARBONERI ROBERTO;VITTOZZI SANDRO
分类号 G01M3/20;G01M3/00 主分类号 G01M3/20
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