| 摘要 |
<p>A method for acquiring exposure point data used for forming an exposure pattern on a substrate by exposure by means of an exposure head by reading out one item of previously stored trace data according to a variation in shape of the substrate. The trace data is reduced, and thereby adequate exposure point data can be acquired. Trace data corresponding to virtual exposure point data traces is acquired and stored in advance, and exposure point data trace information corresponding to an exposure trace on a substrate during the exposure is acquired. According to the exposure point data trance information, exposure image data is sampled. Data on the difference between the sampling data and trace data corresponding to virtual exposure point data trace information similar to the exposure point data trace information is acquired. From the difference coded data and the trace data, exposure point data is acquired.</p> |
