A substrate transfer apparatus has pluralities of pairs of substrate support mechanisms (25). The substrate support mechanism includes a first roller (28) provided on a first rotary shaft (26) and a second roller (29) provided on a second rotary shaft (27), the substrate support mechanism transfers a substrate in a transfer direction while supporting the substrate between the first and second rollers in a thickness direction of the substrate. The pair of the substrate support mechanisms are disposed so as to oppose to each other in a width direction of the substrate and the pairs of the substrate support mechanisms are arranged along with the transfer direction. Further, a substrate position regulating member (30) that regulates a position of the substrate by contacting with a side surface which is parallel to the transfer direction is provided on either of the first and second rotary shafts.
