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发明名称
Multiple electron beam device
摘要
申请公布号
EP1300870(B1)
申请公布日期
2007.04.04
申请号
EP20010123855
申请日期
2001.10.05
申请人
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH
发明人
WINKLER, DIETER;ADAMEC, PAVEL;GOEHL, ACHIM;BANZHOF, HELMUT
分类号
H01J37/304;H01J37/21;H01J37/28;H01J37/317
主分类号
H01J37/304
代理机构
代理人
主权项
地址
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