发明名称 |
Microelectronic device having floating gate protective layer and method of manufacture therefor |
摘要 |
A method of manufacturing a microelectronic device including forming a memory cell having a floating gate located over a substrate, a dielectric layer over the floating gate, and a control gate located over a portion of the dielectric layer, wherein a portion of the dielectric layer is laterally disposed from the control gate. A protective layer is formed over the control gate and the dielectric layer. A mask having an opaque portion over the dielectric layer portion and an opening over the control gate is provided, and the protective layer is patterned employing the mask.
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申请公布号 |
US7199008(B2) |
申请公布日期 |
2007.04.03 |
申请号 |
US20040853455 |
申请日期 |
2004.05.25 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
TSENG SHIH DER |
分类号 |
H01L21/336;H01L21/28;H01L27/105;H01L27/115;H01L29/423;H01L29/788 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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