| 摘要 |
PROBLEM TO BE SOLVED: To provide an SEM capable of measuring and adjusting a dynamic range of brightness intensity of a display image, and provide an image signal processing method. SOLUTION: The SEM 10 is provided with a dynamic range reference value setting part 21 to set the dynamic range reference value, a dynamic range adjusting part 22 to input an observation image signal output by a secondary electron detector 16, to adjust the dynamic range of the observation image signal based on the dynamic range reference value, and to output the observation image signal after adjustment as the after-adjustment observation image signal, a display image forming part 24 to obtain the brightness intensity of respective pixels of the display image based on the after-adjustment observation image signal and to form the display image, a histogram forming part 26 to form a histogram of the brightness intensity of the display image and to extract the maximum value of frequency of the brightness intensity as the brightness intensity peak value, and a display part 27 to display the formed histogram and the extracted brightness intensity peak value. COPYRIGHT: (C)2007,JPO&INPIT
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