| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device that is prevented from stopping for a long time owing to a blur of an optical component. <P>SOLUTION: A fly eye lens 21 has a lens body 21a which is disposed at a first specified position overlapping with an optical path of light and standby lens bodies 21b to 21d having the same function with the lens body 21a and stand by at positions off the optical path. Further, a first BMU has a first compact mirror which is arranged at a 2nd specified position overlapping with the optical path of light and second and third standby mirrors which have the same function with the first compact mirror and stand by at positions off the optical path. The lens body 21a moves to a position off the optical path and, for example, the lens body 21b moves to the first specified position to replace the lens body 21a with the standby lens body. Further, the first compact mirror moves to a position off the optical path and, for example, the second compact mirror moves to the second specified position to replace the fist compact mirror with the standby mirror. <P>COPYRIGHT: (C)2007,JPO&INPIT |
