| 摘要 |
PROBLEM TO BE SOLVED: To get a high-quality deposition results by monitoring a total current proportionate to output power at high speed and quickly controlling the power suitable for deposition state. SOLUTION: This film-creating device, which is equipped with a power unit where power units being controlled into constant power so that the output voltage may be set voltage are connected in parallel with one another, is equipped with a current detector which detects the output currents of the above power unit, a voltage detector which detects the output voltage, a multiplying circuit which outputs a supervisory signal proportionate to output voltage by multiplying the detected current detected with the above current detector by the detected voltage detected with the above voltage detector, and a circuit which converts the supervisory signal from the multiplying circuit into a pilot current signal. Herein, the pilot current signal of each power unit is inputted into a monitoring-circuit through a common signal conductor, and the monitoring circuit adds up the above pilot current signals, and outputs the value as a total power supervisory signal, and the output power of the above power unit is controlled by the above total power supervisory signal. COPYRIGHT: (C)2007,JPO&INPIT
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