Verfahren zur Herstellung einer transparenten leitfähigen Schicht, eine durch dieses Verfahren hergestellte transparente und leitfähige Schicht und Material, das diese Schicht enthält

摘要

A transparent conductive layer forming method is disclosed which comprises the steps of introducing a reactive gas to a discharge space, exciting the reactive gas in a plasma state by discharge at atmospheric pressure or at approximately atmospheric pressure, and exposing a substrate to the reactive gas in a plasma state to form a transparent conductive layer on the substrate, wherein the reactive gas comprises a reducing gas.