VERFAHREN ZUR PLANARISIERUNG VON OBERFLÄCHEN, DIE METALLE DER GRUPPE VIII ENTHALTEN, UNTER VERWENDUNG EINES FIXIERTEN SCHLEIFGEGENSTANDS

摘要

A planarization method includes providing a Group VIII metal-containing surface (preferably, a platinum-containing surface) and positioning it for contact with a fixed abrasive article in the presence of a planarization composition, wherein the fixed abrasive article comprises a plurality of abrasive particles having a hardness of no greater than about 6.5 Mohs dispersed within a binder adhered to at least one surface of a backing material.