| 摘要 |
PROBLEM TO BE SOLVED: To enhance flatness and nano-topography of a disk-like member. SOLUTION: In a method for etching a disk-like member, two or more disk-like members to be etched are held while confronting disk-like surfaces with each other, and rotated within an etching liquid tank around a normal direction of the disk-like surface. A plurality of stirring rods are disposed in parallel with the disk-like surfaces between the confronted disk-like materials to rotate the stirring rods. COPYRIGHT: (C)2007,JPO&INPIT
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