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发明名称
摘要
申请公布号	JP3898363(B2)	申请公布日期	2007.03.28
申请号	JP19980355390	申请日期	1998.11.29
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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