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发明名称
PLASMABEHANDLUNGSVORRICHTUNG UND -VERFAHREN
摘要
申请公布号
DE60033312(D1)
申请公布日期
2007.03.22
申请号
DE20006033312
申请日期
2000.11.14
申请人
LAM RESEARCH CORP.
发明人
BAILEY, D.;SCHOEPP, M.;HEMKER, J.;WILCOXSON, H.;KUTHI, ANDRAS
分类号
H01J37/32;H05H1/46;C23C16/507;H01L21/205;H01L21/3065
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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