| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a connection structure of a piezoelectric actuator and an external wiring board having an excellent connection strength between the piezoelectric actuator and the external wiring board, and a liquid ejector equipped with the connection structure. <P>SOLUTION: In the connection structure between the piezoelectric actuator 11 equipped with a diaphragm 5 and a piezoelectric element 10 having a piezoelectric layer 3 held between a common electrode 4 and a surface electrode 2, a plurality of piezoelectric elements 10 are arranged on the diaphragm 5 in a matrix and a connecting terminal 1 for applying drive voltage on the piezoelectric elements 10 is formed on the surface of the piezoelectric elements 10, and the external wiring board 30 for electrically connecting to the connection terminal 1 for supplying the drive voltage, a bonding agent 25 having a module of elasticity of 0.05 GPa or less is filled between the piezoelectric actuator 11 and the external wiring board 30 to make the thickness 10 μm or more. The liquid ejector includes the correction structure. <P>COPYRIGHT: (C)2007,JPO&INPIT |
