| 摘要 |
PROBLEM TO BE SOLVED: To provide a decompression apparatus in which the space, which is to be decompressed and requires a considerable evacuating capacity when decompressed to have a predetermined decompression degree, can be decompressed efficiently by using a plurality of evacuating units and the pressure fluctuation caused by evacuating units hardly exerts a bad influence on the space to be decompressed. SOLUTION: A buffer tank 12 is connected to the space 1 to be decompressed by a pipeline. The plurality of evacuating units 5 are connected to the buffer tank 12 respectively by exclusive pipelines 13 and made to cause no interference with one another to sufficiently exhibit the evacuating capacity of each of the plurality of evacuating units 5. The buffer tank 12 is made to have a gas-liquid separating function so that a liquid is not sucked by evacuating units 5 even when the liquid is mixed in the exhaust gas from the space 1 to be decompressed. COPYRIGHT: (C)2007,JPO&INPIT
|
