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发明名称
VERFAHREN ZUR HERSTELLUNG VON HALBLEITERVORRICHTUNGEN MIT MESASTRUKTUREN UND VIELFACHEN PASSIVIERUNGSSCHICHTEN UND VERWANDTE VORRICHTUNGEN
摘要
申请公布号
DE60311678(D1)
申请公布日期
2007.03.22
申请号
DE20036011678
申请日期
2003.12.18
申请人
CREE INC.
发明人
HABERERN, W.;ROSADO, RAYMOND;BERGMANN, J.;EMERSON, T.
分类号
H01S5/028;C30B1/00;H01L21/00;H01L33/14;H01S5/042;H01S5/22;H01S5/223;H01S5/227;H01S5/323
主分类号
H01S5/028
代理机构
代理人
主权项
地址
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