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发明名称
Fabricating method for phosphorus- and arsenic- doped p-type ZnO thin films with ampoule-tube method
摘要
申请公布号
KR100698588(B1)
申请公布日期
2007.03.22
申请号
KR20050045764
申请日期
2005.05.30
申请人
发明人
分类号
C23C16/40
主分类号
C23C16/40
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代理人
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