发明名称 |
Micro-oscillation element and method for driving the same |
摘要 |
A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.
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申请公布号 |
US2007063614(A1) |
申请公布日期 |
2007.03.22 |
申请号 |
US20060603006 |
申请日期 |
2006.11.22 |
申请人 |
FUJITSU LIMITED |
发明人 |
TSUBOI OSAMU;KOUMA NORINAO;OKUDA HISAO;SONEDA HIROMITSU;XIAOYU MI;UEDA SATOSHI;SAWAKI IPPEI;NAKAMURA YOSHITAKA |
分类号 |
G02B26/08;B81B3/00;G02B26/00;G02B26/10;H02N1/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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