| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a resist liquid for avoiding the use of an expensive small single-purpose container that can be directly connected to a current LCD panel manufacturing line while reducing the transportation cost of a resist liquid, and in total, for reducing a supply cost of the resist liquid. <P>SOLUTION: The method for manufacturing a resist liquid includes the steps of measuring the concentration and/or viscosity of a liquid in a preparation tank, controlling supply amounts of a source liquid and a solvent for dilution based on the measurement, and reserving the resist liquid for products obtained by controlling dilution in a buffer tank for a predetermined period to stabilize. <P>COPYRIGHT: (C)2007,JPO&INPIT |
