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发明名称
摘要
申请公布号	JP3897110(B2)	申请公布日期	2007.03.22
申请号	JP20020588643	申请日期	2002.05.01
申请人		发明人
分类号	H01L33/32;C09K11/06;H01L33/50;H01L33/54;H01L33/56;H01S3/0941;H01S5/022;H05B33/14	主分类号	H01L33/32
代理机构		代理人
主权项
地址

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