OPTICAL METROLOGY OPTIMIZATION FOR REPETITIVE STRUCTURES

摘要

The top-view profiles of repeating structures in a wafer are characterized and parameters to represent variations in the top- view profile of the repeating structures are selected. An optical metrology model is developed that includes the selected top-view profile parameters of the repeating structures. The optimized optical metrology model is used to generate simulated diffraction signals that are compared to measured diffraction signals.