| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor production treatment system in which the time required until the operating state after QC work can be shortened when a member is replaced.SOLUTION: A wafer processing apparatus 30 includes number of processed wafer counting means for counting the number of processed wafers while integrating, and maintenance post-processing means performing dummy lot processing using a dummy lot and QC lot processing using a QC lot after ending the maintenance processing in the wafer processing apparatus 30. When a first number of processed wafers is counted by the number of processed wafer counting means, a wafer preparation device 10 prepares a dummy lot and a QC lot. When a second number of processed wafers is counted by the number of processed wafer counting means, a transfer device 50 transfers a dummy lot and a QC lot to the wafer processing device 10, before the maintenance processing ends, in parallel with the maintenance processing of the wafer processing device 10. |
