发明名称 SUBLIMATION CHAMBER FOR PHASE CONTROLLED SUBLIMATION
摘要 A method of forming a silicon carbon compound. A silicon source is introduced into an environment. Silicon particles are formed therefrom. One or more hydrocarbons are introduced into the environment separately from the silicon source, thereby forming one or more silicon carbon compounds. A dissociation enhancer may be introduced into the environment to minimize silicon particle size prior to it joining the hydrocarbon source
申请公布号 US2007056507(A1) 申请公布日期 2007.03.15
申请号 US20060556750 申请日期 2006.11.06
申请人 KORDINA OLOF C E 发明人 KORDINA OLOF C.E.
分类号 C30B23/00;C30B23/02;C30B25/00;C30B28/12;C30B28/14 主分类号 C30B23/00
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