| 摘要 |
A vacuum deposition device for manufacturing an OLED(Organic Light Emitting Diode) is provided to improve a characteristic of the OLED by uniformly adjusting a deposition thickness of an organic material deposited on a central part and a border part of a substrate. A vacuum deposition device for manufacturing an OLED includes a chamber(200), a melting pot(230), a substrate holder(220), a heating line unit(207), and a shutter unit. The melting pot(230) is installed at a lower part within the chamber(200), and evaporates a predetermined organic material. The substrate holder(220) is installed at an upper part within the chamber(200), and holds an object to be deposited. The heating line unit(207) is installed on a boarder unit of the chamber(200). The heating line unit(207) is used for adjusting an evaporation speed of the organic material evaporated by the melting pot(230), and is installed in the border part of the chamber(200). The heating line unit(207) is formed on the whole surface or a part of an inner border of the chamber(200). The shutter unit adjusts a flowing quantity of the organic material evaporated in the melting pot(230) to the substrate holder(220). |
