| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate treatment equipment equipped with a reaction tube which makes it possible to easily position an insert to be inserted into an insert tube arranged inside the reaction tube and to clean the insert tube and remove a liquid out of it easily. SOLUTION: Inside the reaction tube 1 for treating a substrate, the insert tube 2 to insert various types of sensors is arranged. The insert tube 2 penetrates the interior of the reaction tube 1 and includes an opening portion A1 which is exposed outside in a lower part of the reaction tube 1, while including an opening portion A2 which is exposed outside in an upper part of the reaction tube 1. A thermocouple or the like is inserted from the opening portion A1 to measure the internal temperature of the reaction tube 1. Due to this structure of the insert tube 2, the thermocouple inserted from the opening portion A1 can be positioned at a correct position in the insert tube 2 by a pushing operation from the opening portion A1 and a pulling operation from the opening portion A2. Since both ends of the insert tube 2 are opened, foreign matters hardly attach to the inside of the tube and the inside of the tube can be easily cleaned with washing water or dry air. COPYRIGHT: (C)2007,JPO&INPIT
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