Additives to prevent degradation of cyclic alkene derivatives

摘要

A stabilized cyclic alkene composition comprising one or more cyclic alkenes, and at least one antioxidant compound having the formula (I), wherein R¹ through R⁵ can each independently be H, OH, C₁-C₈ linear, branched, or cyclic alkyl, C₁-C₈ linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl, and wherein the antioxidant compound is present in an amount between 1 ppm and 200 ppm and has a boiling point lower than 265° C. A method for forming a layer of carbon-doped silicon oxide on a substrate, which uses the stabilized alkene composition and a silicon containing compound.