| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor provided with a dielectric film capable of exhibiting a sufficiently high dielectric constant and to provide a method of fabricating a dielectric film capable of producing a dielectric film while sufficiently suppressing oxidization of a metal layer to cause a sufficiently high dielectric constant to come out. SOLUTION: The capacitor 100 has a dielectric film 1 and a first electrode 2 and a second electrode 3 provided oppositely while sandwiching the dielectric film 1, wherein the dielectric film 1 has a density in excess of 72% of a theoretical density calculated on the basis of a lattice constant, and at least one of the first electrode 2 and the second electrode 3 contains at least one metal selected from the group consisting of Cu, Ni, Al, stainless steel and Inconel (trade mark). COPYRIGHT: (C)2007,JPO&INPIT |
