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发明名称
OPTISCHES REDUKTIONSSYSTEM MIT KONTROLLE DER BELICHTUNGSPOLARISATION
摘要
申请公布号
DE60124524(T2)
申请公布日期
2007.03.08
申请号
DE20016024524T
申请日期
2001.04.25
申请人
ASML HOLDING, N.V.
发明人
KREUZER, L.
分类号
G02B5/30;G02B27/28;G02B17/08;G02B27/18;G03F7/20;G03F7/22;H01L21/027
主分类号
G02B5/30
代理机构
代理人
主权项
地址
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