| 摘要 |
A method for forming micro-texture on an air bearing surface of a magnetic read/write slider, including: positioning sliders arranged in arrays on a tray, each slider having a pole tip facing upward; loading the tray into a processing chamber, which is then evacuated to a preset pressure; introducing a processing gas containing oxygen into the processing chamber; exposing the sliders to an etching means in the atmosphere of the processing gas to etch the surface of the slider so as to form a clear two-step structure thereon.
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