METHOD OF MANUFACTURING SILICONE MOLDING DIE FOR MANUFACTURING STRUCTURE, AND SILICONE MOLDING DIE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a silicon molding die for effectively manufacturing a structure having a plurality of painless needles (fine needles). SOLUTION: The method for manufacturing the silicon molding die comprises exposing a region of a silicon substrate corresponding to a supporting plate part (2), covering a region corresponding to the fine needles part (4) with a metal film, etching the region corresponding to the supporting plate part (2), thereafter removing the metal film, and further etching. Thus, the molding die having a thickness corresponding to the supporting plate part (2) different from that corresponding to the fine needles part (4) is manufactured. COPYRIGHT: (C)2007,JPO&INPIT