Apparatus for manipulation of an optical element

摘要

The invention relates to an apparatus for manipulation of an optical element ( 7 ) in up to six degrees of freedom with respect to a structure ( 8 ) via at least three actuator devices ( 9 ). The actuator devices ( 9 ) each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points ( 11 ) of the actuator devices ( 9 ) acting directly on the optical element ( 7 ).