| 摘要 |
A board processing apparatus is provided to minimize heat loss and pressure drop by integrally installing a pumping member in a storage, thereby preventing a fouling phenomenon. A board processing apparatus includes a housing(3), a processing part(5) integrally formed on an upper portion of the housing, a storage(7) integrally formed on a lower portion of the housing, a pumping member(15) installed in the storage for circulating a chemical stored in the storage to the processing part, and a spray portion connected to the pumping member. The housing is divided into an upper portion and a lower portion by a separate plate(9), and an opening(13) is formed on the separate plate.
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