| 摘要 |
A micro-mirror device and a micro-mirror device array using the same are provided to decrease dynamic deflection in driving a mirror plate and to prevent the degradation of the light reflected from the mirror plate by forming an outer frame separated from the mirror plate except for a connecting unit correspondingly to the circumference of the mirror plate. A micro-mirror device is composed of a mirror plate(51) comprising a thin film having a reflection surface for reflecting the input light and a frame for supporting the thin film; an outer frame(52) formed along the circumference of the mirror plate with the same gravity center as the mirror plate and separated from the mirror plate; a plurality of connecting units(53,54) for coupling the mirror plate and the outer frame; and elastic structures(55) formed symmetrically to each other to float the mirror plate and the outer frame from the lower side by connecting the outer frame to a support unit.
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