发明名称 LACTATE-CONTAINING CORROSION INHIBITOR
摘要 The corrosion of aluminum-based metal films may be minimized by applying a lactate-containing solution to the aluminum-based metal films before the aluminum-based metal films are etched. The lactate-containing solution is applied to the aluminum-based metal film before the film is etched with a corrosive etchant. Minimizing the corrosion of the aluminum-based film may increase the yield and performance of the highly reflective pixel arrays that are formed from the aluminum-based metal for use in liquid crystal on silicon (LCOS) microprocessors for digital televisions. ® KIPO & WIPO 2007
申请公布号 KR20070024658(A) 申请公布日期 2007.03.02
申请号 KR20067027478 申请日期 2006.12.27
申请人 INTEL CORP. 发明人 STEPHENSON ADAM R.;CHIANG HUE D.
分类号 H01L21/3213;C23F11/00;G02F1/1335;H01L21/304 主分类号 H01L21/3213
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