发明名称 |
LACTATE-CONTAINING CORROSION INHIBITOR |
摘要 |
The corrosion of aluminum-based metal films may be minimized by applying a lactate-containing solution to the aluminum-based metal films before the aluminum-based metal films are etched. The lactate-containing solution is applied to the aluminum-based metal film before the film is etched with a corrosive etchant. Minimizing the corrosion of the aluminum-based film may increase the yield and performance of the highly reflective pixel arrays that are formed from the aluminum-based metal for use in liquid crystal on silicon (LCOS) microprocessors for digital televisions. ® KIPO & WIPO 2007
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申请公布号 |
KR20070024658(A) |
申请公布日期 |
2007.03.02 |
申请号 |
KR20067027478 |
申请日期 |
2006.12.27 |
申请人 |
INTEL CORP. |
发明人 |
STEPHENSON ADAM R.;CHIANG HUE D. |
分类号 |
H01L21/3213;C23F11/00;G02F1/1335;H01L21/304 |
主分类号 |
H01L21/3213 |
代理机构 |
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主权项 |
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地址 |
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