发明名称 METHOD FOR PREPARING PIEZOELECTRIC MATERIALS
摘要 <p>The invention concerns a method for preparing a material based on piezoelectric ceramic oxide(s) comprising the following steps: a) wet deposition on at least one surface of a substrate of a layer of a dispersion comprising a piezoelectric ceramic oxide powder and a piezoelectric ceramic oxide precursor sol-gel solution identical to or different from the piezoelectric oxide constituting the powder; b) repeating a) once or several times, so as to obtain a stack of at least two layers; c) heat-treating said layers so as to transform them into corresponding ceramics; d) wet-shrink impregnation of the stack obtained at c) with a sol-gel solution identical to the one used in step a); e) optionally repeating step d) once or several times; f) heat-treating said stack, so as to transform the sol-gel impregnating the stack into the corresponding piezoelectric ceramics.</p>
申请公布号 EP1756882(A1) 申请公布日期 2007.02.28
申请号 EP20050778186 申请日期 2005.06.16
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 BOY, PHILIPPE;EHRHART, GILLES;BELLEVILLE, PHILIPPE
分类号 H01L41/318;H01L41/39;H01L41/43 主分类号 H01L41/318
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