发明名称 Methods for forming small contacts
摘要 Methods are provided for forming contacts for a semiconductor device. The methods may include depositing various materials, such as polysilicon, nitride, oxide, and/or carbon materials, over the semiconductor device. The methods may also include forming a contact hole and filling the contact hole to form the contact for the semiconductor device.
申请公布号 US7183223(B1) 申请公布日期 2007.02.27
申请号 US20030728909 申请日期 2003.12.08
申请人 ADVANCED MICRO DEVICES, INC. 发明人 TABERY CYRUS E.;DAKSHINA-MURTHY SRIKANTESWARA;YANG CHIH-YUH;YU BIN
分类号 H01L21/302 主分类号 H01L21/302
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